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Materials and Failures in MEMS and NEMS


Materials and Failures in MEMS and NEMS
  • Author : Atul Tiwari
  • Publisher : John Wiley & Sons
  • Release : 2015-09-11
  • ISBN : 9781119083870
  • Language : En, Es, Fr & De
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The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. Although, an enormous amount of work being accomplished in the area, most of the information is treated as confidential or privileged. It is extremely hard to find the meaningful information for the new or related developments. This book is collection of chapters written by experts in MEMS and NEMS technology. Chapters are contributed on the development of new MEMS and NEMS materials as well as on the properties of these devices. Important properties such as residual stresses and buckling behavior in the devices are discussed as separate chapters. Various models have been included in the chapters that studies the mode and mechanism of failure of the MEMS and NEMS. This book is meant for the graduate students, research scholars and engineers who are involved in the research and developments of advanced MEMS and NEMS for a wide variety of applications. Critical information has been included for the readers that will help them in gaining precise control over dimensional stability, quality, reliability, productivity and maintenance in MEMS and NEMS. No such book is available in the market that addresses the developments and failures in these advanced devices.

Performance of a MEMS Heat Exchanger for a Cryosurgical Probe


Performance of a MEMS Heat Exchanger for a Cryosurgical Probe
  • Author : Michael Joseph White
  • Publisher :
  • Release : 2008
  • ISBN : WISC:89099673261
  • Language : En, Es, Fr & De
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Materials and Failures in MEMS and NEMS


Materials and Failures in MEMS and NEMS
  • Author : Atul Tiwari
  • Publisher : John Wiley & Sons
  • Release : 2015-09-11
  • ISBN : 9781119083863
  • Language : En, Es, Fr & De
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The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. Although, an enormous amount of work being accomplished in the area, most of the information is treated as confidential or privileged. It is extremely hard to find the meaningful information for the new or related developments. This book is collection of chapters written by experts in MEMS and NEMS technology. Chapters are contributed on the development of new MEMS and NEMS materials as well as on the properties of these devices. Important properties such as residual stresses and buckling behavior in the devices are discussed as separate chapters. Various models have been included in the chapters that studies the mode and mechanism of failure of the MEMS and NEMS. This book is meant for the graduate students, research scholars and engineers who are involved in the research and developments of advanced MEMS and NEMS for a wide variety of applications. Critical information has been included for the readers that will help them in gaining precise control over dimensional stability, quality, reliability, productivity and maintenance in MEMS and NEMS. No such book is available in the market that addresses the developments and failures in these advanced devices.

Recuperative Heat Exchanger for a MEMS Cryoprobe


Recuperative Heat Exchanger for a MEMS Cryoprobe
  • Author : Michael T. Frank
  • Publisher :
  • Release : 2004
  • ISBN : WISC:89088993092
  • Language : En, Es, Fr & De
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MEMS


MEMS
  • Author : Mohamed Gad-el-Hak
  • Publisher : CRC Press
  • Release : 2005-11-29
  • ISBN : 9781420036572
  • Language : En, Es, Fr & De
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As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled. The first of three volumes, MEMS: Introduction and Fundamentals covers the theoretical and conceptual underpinnings of the field, emphasizing the physical phenomena that dominate at the micro-scale. It also explores the mechanical properties of MEMS materials, modeling and simulation of MEMS, control theory, and bubble/drop transport in microchannels. Chapters were updated where necessary, and the book also includes two new chapters on microscale hydrodynamics and lattice Boltzmann simulations. This volume builds a strong foundation for further study and work in the MEMS field. MEMS: Introduction and Fundamentals comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.